Snapdown prevention in voltage controlled MEMS devices

Details Snapdown prevention in voltage controlled MEMS devices Snapdown prevention in voltage controlled MEMS devices

2007-10-26

2009-08-11

Nguyen, Danny (Department: 2836)

Electricity: electrical systems and devices

Control circuits for electromagnetic devices

For relays or solenoids

C361S233000

Reexamination Certificate

active

07573695

ABSTRACT:
An architecture and method are provided for preventing snapdown in a voltage controlled MEMS device having a movable actuator with an actuator electrode coupled to a high voltage power supply (HVPS) through a drive circuit, the movable actuator suspended over a cavity electrode formed on a substrate and coupled to a common backplane supply (VssC). Generally, the circuit includes a number of first diodes coupled between the HVPS and the actuator electrode and/or the cavity electrode to provide a forward-biased path to transfer a positive charge to the HVPS when the accumulated charge exceeds a predetermined threshold. Preferably, the drive circuit further includes second diodes to provide a low impedance path to transfer a positives charge from the actuator electrode and/or the cavity electrode to a substrate ground when the accumulated charge results in or exceeds a predetermined threshold voltage. Other embodiments are also disclosed.

REFERENCES:
patent: 7123399 (2006-10-01), Gudeman et al.
patent: 7529017 (2009-05-01), Walker et al.

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