Chemistry of inorganic compounds – Carbon or compound thereof – Elemental carbon
Patent
1996-03-22
1999-11-23
Kunemund, Robert
Chemistry of inorganic compounds
Carbon or compound thereof
Elemental carbon
423445B, 117108, 117109, 117929, C30B 2904
Patent
active
059895110
ABSTRACT:
An article and method of manufacture of a nanocrystalline diamond film. The nanocrystalline film is prepared by forming a carbonaceous vapor, providing an inert gas containing gas stream and combining the gas stream with the carbonaceous containing vapor. A plasma of the combined vapor and gas stream is formed in a chamber and fragmented carbon species are deposited onto a substrate to form the nanocrystalline diamond film having a root mean square flatness of about 50 nm deviation from flatness in the as deposited state.
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Bindal Cuma
Erdemir Ali
Gruen Dieter M.
Krauss Alan R.
Zuiker Christopher D.
Kunemund Robert
The University of Chicago
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