Smart overlay control

Details Smart overlay control Smart overlay control

2006-04-18

2006-04-18

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S095000, C700S117000, C716S030000

Reexamination Certificate

active

07031794

ABSTRACT:
An automatic method to maintain and correct overlay in the fabrication of integrated circuits is described. An overlay control table is automatically generated for lots run through a process tool. An overlay correction is calculated from the overlay control table and sent to the process tool for real-time or manual overlay correction.

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