Small vacuum compatible hyperthermal atom generator

Details Small vacuum compatible hyperthermal atom generator Small vacuum compatible hyperthermal atom generator

1994-11-21

1997-08-05

Anderson, Bruce C.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 300

Patent

active

056545410

ABSTRACT:
A vacuum compatible hyperthermal atom generator includes a membrane having two sides, the membrane having the capability of dissolving atoms into the membrane's bulk. A first housing is furnished in operative association with the first side of the membrane to provide for the exposure of the first side of the membrane to a gas species. A second housing is furnished in operative association with the second side of the membrane to provide a vacuum environment having a pressure of less than 1.times.10.sup.-3 Torr on the second side of the membrane. Exciting means excites atoms adsorbed on the second side of the membrane to a non-binding state so that a portion from 0% to 100% of atoms adsorbed on the second side of the membrane are released from the second side of the membrane primarily as an atom beam.

REFERENCES:
patent: 4542010 (1985-09-01), Roman et al.
patent: 4599157 (1986-07-01), Suzuki et al.
patent: 4686022 (1987-08-01), Rempt
patent: 4828817 (1989-05-01), Outlaw et al.
patent: 5367161 (1994-11-01), Outlaw et al.

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