Small UHV compatible hyperthermal oxygen atom generator

Details Small UHV compatible hyperthermal oxygen atom generator Small UHV compatible hyperthermal oxygen atom generator

1993-07-02

1994-11-22

Anderson, Bruce C.

Radiant energy

Electrically neutral molecular or atomic beam devices and...

H05H 300

Patent

active

053671619

ABSTRACT:
A high purity, hyperthermal, continuous beam atomic oxygen source capable of retrofitting to existing UHV systems has been developed. The instrument complements a general system capability, while its small size and simplicity of design permits tailoring the instrument for most experimental geometries. The flux level presently available is near 1.times.10.sup.14 cm.sup.-2 s.sup.-1 (.sup.3 P) but may be extended toward the theoretical limit of 3.times.10.sup.15 cm.sup.-2 s.sup.-1. The energy distribution of the emitted neutrals shows that the mean kinetic energy is about the same as observed for the ions or about 5 eV. The energy of the oxygen atoms may be substantially reduced for other applications by collision with a temperature controlled, non-reactive surface (with a concomitant spread in the energy distribution).

REFERENCES:
patent: 4542010 (1985-09-01), Roman et al.
patent: 4599157 (1986-07-01), Suzuki et al.
patent: 4686022 (1987-08-01), Rempt
patent: 4828817 (1989-05-01), Outlaw

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