Small thin film movable element, small thin film movable...

Details Small thin film movable element, small thin film movable... Small thin film movable element, small thin film movable...

2006-07-26

2008-10-14

Spector, David N (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S295000, C345S084000

Reexamination Certificate

active

07436575

ABSTRACT:
A small thin film movable element comprises; a movable portion supported elastically deformably and having a movable electrode at at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the voltage applied in displacing the movable portion falls in a range equal to or lower than a static pull-in voltage for bringing the movable portion into contact with a side of the fixed electrode against a resistance force generated in accordance with an amount of displacing the movable portion and equal to or higher than a minimum dynamic pull-in voltage for bringing the movable portion into contact with the side of the fixed electrode by being compounded with an inertia force generated in accordance with an operation of the movable portion.

REFERENCES:
patent: 7075693 (2006-07-01), Ljungblad
patent: 2003/0028360 (2003-02-01), Bochobza-Degani et al.
patent: 2007/0258124 (2007-11-01), Chen et al.
patent: 2008/0074728 (2008-03-01), Ogikubo et al.
patent: 2-7014 (1990-01-01), None
patent: 8-334709 (1996-12-01), None

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