Optical: systems and elements – Polarization without modulation – By relatively adjustable superimposed or in series polarizers
Reexamination Certificate
2006-08-29
2006-08-29
Chang, Audrey (Department: 2872)
Optical: systems and elements
Polarization without modulation
By relatively adjustable superimposed or in series polarizers
C359S494010, C359S490020
Reexamination Certificate
active
07099081
ABSTRACT:
A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.
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Johnson Kenneth C.
Norton Adam E.
Stanke Fred E.
Chang Audrey
Stallman & Pollock LLP
Tokyo Electron Limited
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