Small size axial-flow molecular pump using a magnetic bearing

Details Small size axial-flow molecular pump using a magnetic bearing Small size axial-flow molecular pump using a magnetic bearing

1985-01-25

1988-01-05

Smith, Leonard E.

Pumps

Motor driven

Axial thrust balancing means for rotary pump and motor

417424, F04B 1700

Patent

active

047173157

ABSTRACT:
An axial-flow molecular pump has a first active magnetic bearing for axially supporting and controlling a pump member comprised of a set of permanent magnets on the upper end of the pump member cooperating with a set of permanent magnets fixedly mounted at the upper end of a pump housing, a first electromagnet coacting with the sets of permanent magnets and operative when energized for controlling the axial position of the pump member, and an axial sensor for detecting axial displacement of the pump member and accordingly controlling the energization of the first electromagnet. A second active magnetic bearing for radially supporting and controlling the pump member comprises a second electromagnet operative when energized for controlling the radial position of the pump member, and a radial sensor for detecting radial displacement of the pump member and accordingly controlling the energization of the second electromagnet. Radial vibrations of the pump member during rotation thereof are rapidly suppressed in a very short decay time period due to the two active magnetic bearings which have rapid response characteristics and are able to effect precise and accurate positioning of the pump member.

REFERENCES:
patent: 3890019 (1975-06-01), Boden et al.
patent: 3954310 (1976-05-01), Rava
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4036565 (1977-07-01), Becker
patent: 4082376 (1978-04-01), Wehde et al.
patent: 4116592 (1978-09-01), Cherny et al.
patent: 4121143 (1978-10-01), Habermann et al.

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