Small scale wires with microelectromechanical devices

Details Small scale wires with microelectromechanical devices Small scale wires with microelectromechanical devices

2008-03-04

2008-03-04

Coleman, W. David (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C977S700000, C977S762000

Reexamination Certificate

active

07339244

ABSTRACT:
A process cycles between etching and passivating chemistries to create rough sidewalls that are converted into small structures. In one embodiment, a mask is used to define lines in a single crystal silicon wafer. The process creates ripples on sidewalls of the lines corresponding to the cycles. The lines are oxidized in one embodiment to form a silicon wire corresponding to each ripple. The oxide is removed in a further embodiment to form structures ranging from micro sharp tips to photonic arrays of wires. Fluidic channels are formed by oxidizing adjacent rippled sidewalls. The same mask is also used to form other structures for MEMS devices.

REFERENCES:
patent: 6130142 (2000-10-01), Westwater et al.
patent: 7129554 (2006-10-01), Lieber et al.
Ayon, A. A., et al., “Characterization of a time multiplexed inductively coupled plasma etcher”,Journal of the Electrochemical Society, 146(1), (Jan. 1999),339-349.
Bourland, S. , et al., “Silicon-on-insulator Processes for the Fabrication of Novel Nanostructures”,J. Vac. Sci. Technol. B, 19, No. 5, (Sep. 2001),1995-1997.
Chen, Jun , et al., “Field emission from crystalline copper sulphide nanowire arrays”,Applied Physics Letters, 80 (19), (May 2002),3620-3622.
Cui, Yi , et al., “Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species”,Science, 293 (5533), (Aug. 2001),1289-1292.
Doherty, L. , et al., “Application of MEMS technologies to nanodevices”,Proceedings of the 2003 IEEE International Symposium on Circuits and Systems, vol. 3, (2003),934-937.
Huber, T. E., et al., “Thermopower of Bi nanowire array composites”,Thermoelectric Materials 2000. Materials for Small-Scale Refrigeration and Power Generation Applications, 626, Materials Research Society Symposium Proceedings, San Francisco, CA,(Apr. 2000),Z14.2.1-Z14.2.5.
Ju, X. , et al., “Preparation and photoluminescence of nanowire array and films of cadmium sulfide by electrodepositing in organic solvent”,Proceedings of the SPIE, 4601, (2001),260-265.
Li, Jian-Long , “Spontaneous formation of ordered indium nanowire array on Si(001)”,Applied Physics Letters, 79(17), (Oct. 2001),2826-2828.
Liu, H. I., et al., “Self-limiting oxidation for fabricating sub-5nm silicon nanowires”,Applied Physics Letters, 64(11), (Mar. 14, 1994),1383-1385.
Lizhu, Zhang , et al., “Photoluminescence of a silicon quantum wire array fabricated by electrolytic etching”,Chinese Physics, 12(3), (Jul.-Sep. 1992),768-772.
Milanovic, V. , et al., “Micromachining Technology for Lateral Field Emission Devices”,IEEE Transactions on Electron Devices, 48(1), (Jan. 2001),166-173.
Milanovic, V. , et al., “Micromachining Technology for Lateral Filed Emission Devices”,IEEE Transactions on Electron Devices, vol. 48(1), (Jan. 2001),166-173.
Nakayama, T. , et al., “Thermally stable C60 nanowires on Si substrates”,RIKEN Review, No. 45, Inst. Phys. Chem. Res.,(Mar. 2002),3-5.
Namatsu, H. , et al., “Fabrication of One-Dimensional Nanowire Structures Utilizing Crystallographic Orientation in silicon and their Conductance Characteristics”,J. Vac. Sci. Technol. B, 15, No. 5, (Sep. 1997),1688-1696.
Ono, T. , et al., “Micromachined probe for high density data storage”,Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics, pt. 2, p II, Chiba, Japan Piscataway, NJ: IEEE, 2001,(Jul. 15-19, 2001),542-543.
Potts, A. , et al., “Fabrication of free-standing single-crystal silicon nanostructures for the study of thermal transport and defect scattering in low dimensional systems”,Japanese Journal of Applied Physics, Part 1(Regular Papers&Short Notes), 29(11), (Nov. 1990),2675-2679.
Roy, E. , “Electrochemical synthesis of antimony nanowires and analysis of diffusion layers”,Journal of Nanoscience and Nanotechnology, 1 (3), (Sep. 2001),323-329.
Wang, Z. , et al., “AFM study of gold nanowire array electrodeposited within anodic aluminum oxide template”,Applied Physics A(Materials Science Processing), A74 (4), Springer-Verlag,(Apr. 2002),563-565.
Wang, Y. W., et al., “Fabrication and magnetic properties of highly ordered Co16Ag84 alloy nanowire array”,Applied Physics A(Materials Science Processing), A74 (4), Springer-Verlag,(Apr. 2002),577-580.
Wang, Y. Q., et al., “One-dimensional growth mechanism of amorphous boron nanowires”,Chemical Physics Letters, 359 (3-4), (Jun. 2002),273-277.
Wang, J. Z., et al., “Ordered Ga wires formed on Si(100)-2*n: Scanning tunneling microscopy study”,Physical Review B, Condensed Matter and Materials Physics, 65 (23), (Jun. 2002),235303/1-5.
Westwater, J. , et al., “Growth of silicon nanowires via gold/silane vapor-liquid-solid reaction”,Journal of Vacuum Science and Technology, 15(3), (May 1997),554-557.
Zaidi, S. H., et al., “Multiple nanowire gate field effect transistors”,Proceedings of the 2001 1st IEEE Conference on Nanotechnology. IEEE-NANO 2001, IEEE-NANO, Maui, HI,(Oct. 2001),189-194.
Zhang, Y. F., et al., “Bulk-quantity Si nanowires synthesized by SiO sublimation”,Journal of Crystal Growth, 212, (Apr. 2000),115-118.
Zhang, J. , et al., “Morphology and Raman scattering spectrum of GaN nanowires embedded in nanochannels of template”,Journal of Physics D, Applied Physics, 35 (13), (Jul. 2002),1481-1485.
Zhu, Hao , “Fabrication and magnetic properties of Fe14Ni86 alloy nanowire array”,Journal of Physics: Condensed Matter, 13 (8), (Feb. 2001),1727-1731.

Affiliated with

Also associated with

Rating

Small scale wires with microelectromechanical devices does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Small scale wires with microelectromechanical devices, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Small scale wires with microelectromechanical devices will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2816127