Small field scanner

Details Small field scanner Small field scanner

1993-01-05

1993-10-19

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Methods

355 51, 355 53, G03B 2742, G03B 2732

Patent

active

052550516

ABSTRACT:
A method and apparatus for printing arbitrarily large circuit patterns using small field optics. The use of small field imaging optics allows the use of high NA lens designs capable of printing smaller geometries than otherwise would be possible. The field size in a first axis is extended by scanning an object and image past the lens; the field size in a second axis is extended by stitching the scans together in an overlapped fashion. This overlapped printing technique averages many random and systematic errors and allows the placement of field adjacencies within die boundaries. The effective field size of such a system is limited only by reticle size and stage mechanics. The apparatus further includes error correction loops for enhancing stage synchronization accuracy and for reducing field adjacency errors.

REFERENCES:
patent: 4688932 (1987-08-01), Suzuki
patent: 4708466 (1987-11-01), Isohata et al.
patent: 4878086 (1989-10-01), Isohata
patent: 4924257 (1990-05-01), Jain
patent: 4933714 (1990-06-01), Buckley et al.
patent: 4958160 (1990-09-01), Ito et al.

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