Small-beam lateral-shear interferometer

Details Small-beam lateral-shear interferometer Small-beam lateral-shear interferometer

2005-08-30

2005-08-30

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

Having shearing

Reexamination Certificate

active

06937347

ABSTRACT:
A lateral-shear interferometer utilizes two relatively thick glass plates bonded together in a single block with a tilted air gap between opposing inner surfaces. The thickness of the glass plates is selected to be sufficiently large to separate the output beams from the light reflected from the top and bottom surfaces of the block, thereby eliminating the need for antireflection coatings. The shear interferometer is combined with an external mirror mounted on a tilt stage actuated by a computer-controlled tilt actuator to perform phase-shifting interferometric analysis in conventional manner.

REFERENCES:
patent: 4953981 (1990-09-01), Hales
patent: 5355218 (1994-10-01), Matsuda et al.
patent: 5543916 (1996-08-01), Kachanov
patent: 5923452 (1999-07-01), Carlson
Mantravadi, M. V., Chapter 4 of Optical Shop Testing, John Wiley & Sons, Inc., Second Edition (1992), pp. 123-169.
Melles Griot Catalog, p. 47.12.

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