Small angle high frequency angular displacement measurement...

Details Small angle high frequency angular displacement measurement... Small angle high frequency angular displacement measurement...

2008-01-29

2008-01-29

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07324213

ABSTRACT:
A system to determine unwanted noise produced by simulation equipment. In one embodiment, an angular rotation noise measuring system comprises a stable body, a laser, at least one interferometer and at least one mirror. The laser is adapted to generate a primary laser beam and is mounted to the stable body. The at least one interferometer is adapted to split the primary laser beam into two or more out of phase secondary laser beams. Moreover, the interferometer is coupled to the stable body. The at least one mirror is coupled to a fixture on a vibration generating device. The fixture is adapted to hold a device under test. Each mirror is adapted to reflect an associated secondary laser beam back to the interferometer such that an interference pattern is formed with the secondary laser beams. Changes to the interference pattern determine the angular rotation noise caused by the vibration generating device.

REFERENCES:
patent: 6213443 (2001-04-01), Wakui
patent: WO 2004/097433 (2004-11-01), None
Umeda et al, Calibration of a Three-Axis Acclerometer as a Three-Dimensional Accelerometer Using Laser Interferometers and a Three-Di, Calibration of a Three-Axis Accelerometer Using Laser Interferometers and a Three-Dimensional Vibration Generator, Jun. 4, 2003, Publisher:Journal Of The Japan Society Of Mechanical Engineers, pp. 67-70, Published in: JP.

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