Slurry recycling method

Details Slurry recycling method Slurry recycling method

2005-08-16

2005-08-16

Nguyen, George (Department: 3723)

Abrading

Abrading process

Abradant supplying

C451S087000, C451S088000, C451S446000

Reexamination Certificate

active

06929537

ABSTRACT:
A slurry recycling method comprising the steps of: separating a spent slurry containing silicon dust resulting from slicing of a silicon ingot in the presence of a slurry composed of abrasive grains and a dispersion medium in which the abrasive grains are dispersed, into a dispersion mainly containing the abrasive grains and a dispersion mainly containing the silicon dust; recovering the dispersion medium by centrifuging and/or distilling the dispersion mainly containing the silicon dust; and reproducing a slurry using abrasive grains or the dispersion mainly containing abrasive grains, and the recovered dispersion medium.

REFERENCES:
patent: 5799643 (1998-09-01), Miyata et al.
patent: 6322710 (2001-11-01), Katsumata et al.
patent: 6615817 (2003-09-01), Horio
patent: 6743078 (2004-06-01), McClain et al.
patent: 11-156719 (1999-06-01), None
patent: 11-172237 (1999-06-01), None
patent: 2001-277115 (2001-10-01), None
patent: 2001-310260 (2001-11-01), None
patent: 2001-322066 (2001-11-01), None

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