Slurry recycling in CMP apparatus

Details Slurry recycling in CMP apparatus Slurry recycling in CMP apparatus

1996-07-29

1997-09-09

Morgan, Eileen

Abrading

Abrading process

Abradant supplying

451 41, 451 36, 451285, 451287, 451446, B24B 100

Patent

active

056649908

ABSTRACT:
Recycled slurry is continuously blended with the slurry in use to provide a consistent polishing rate while consuming or discarding a small fraction of the slurry flowing continuously across the polishing pad. The slurry is recovered in a catch ring and fed to a recycle loop to blend the recovered slurry with fresh slurry, rejuvenating chemicals, or water; test the blend; filter the blend; and return the blend to the polishing pad. The volume returned to the pad slightly exceeds the volume recovered, causing the catch ring to overflow. Rinse water is recycled in the same fashion to keep the polishing pad wet between polishing cycles.

REFERENCES:
patent: 3905162 (1975-09-01), Lawrence et al.
patent: 4059929 (1977-11-01), Bishop
patent: 5142828 (1992-09-01), Curry, II
patent: 5490809 (1996-02-01), Jones et al.
patent: 5545076 (1996-08-01), Yun et al.
patent: 5575705 (1996-11-01), Yam et al.

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