Slurry pump control system

Details Slurry pump control system Slurry pump control system

2005-04-12

2005-04-12

Eley, Timothy V. (Department: 3724)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C137S012000, C451S008000, C451S060000, C451S099000, C451S446000

Reexamination Certificate

active

06878037

ABSTRACT:
A CMP slurry pumping system and method which uses the slurry pump inlet pressure as input to the pump controller, and the controller adjusts pump speed to account for variations in inlet pressure.

REFERENCES:
patent: 3500591 (1970-03-01), Keith et al.
patent: 3653842 (1972-04-01), Pulman
patent: 4025121 (1977-05-01), Kleysteuber et al.
patent: 4059929 (1977-11-01), Bishop
patent: 4380412 (1983-04-01), Walsh
patent: 4547128 (1985-10-01), Hayes
patent: 5479957 (1996-01-01), Crow et al.
patent: 5538462 (1996-07-01), Gnadt
patent: 5540555 (1996-07-01), Corso et al.
patent: 5616831 (1997-04-01), Ferland et al.
patent: 5857893 (1999-01-01), Olsen et al.

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