Slurry polisher using ultrasonic agitation

Details Slurry polisher using ultrasonic agitation Slurry polisher using ultrasonic agitation

1992-04-02

1993-09-21

Rose, Robert A.

Abrasive tool making process, material, or composition

Impregnating or coating an abrasive tool

51317, 51262A, 51325, B24B 53007

Patent

active

052457966

ABSTRACT:
Slurry in a slurry polisher is ultrasonically agitated during polishing to dislodge embedded debris and grit from the polishing pad and thereby improve the uniformity of material removal, lengthen the life of the pad and avoid scratches and defects on the surface being polished. The method is particularly useful for applications in which slurry polishing is used for planarizing deposited layers on semiconductor wafers where non-uniformities caused by such embedded material can affect process yields. Apparatus is disclosed for applying ultrasonic energy to the slurry so that such energy is focussed on the pad.

REFERENCES:
patent: 3093937 (1963-06-01), Balamuth et al.
patent: 3123951 (1964-03-01), Kuris et al.
patent: 3855441 (1974-12-01), Kimmelmann
patent: 4004375 (1977-01-01), Wieck
patent: 4069805 (1978-01-01), Sherman
patent: 4927432 (1990-05-01), Budinger et al.
patent: 5055158 (1991-10-01), Gallagher et al.
patent: 5104828 (1992-04-01), Morimoto et al.
patent: 5154021 (1992-10-01), Bombardier et al.

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