Fluid sprinkling – spraying – and diffusing – Flow deflecting or rotation controlling means – Chamber-like deflector
Patent
1999-12-06
2000-11-21
Kashnikow, Andres
Fluid sprinkling, spraying, and diffusing
Flow deflecting or rotation controlling means
Chamber-like deflector
239520, B05B 126
Patent
active
061490784
ABSTRACT:
A slurry nozzle for supplying slurry in chemical mechanical polishing (CMP) including at least one slurry line, a slurry nozzle enclosure for accommodating the slurry line, and a baffle ring mounted at one end of the slurry nozzle enclosure. A plurality of apertures is formed on the sidewall of the slurry line for the slurry to spray out. The slurry spraying out from the slurry line flows down along the inner sidewall of the slurry baffle ring after the slurry impinges onto the slurry baffle ring.
REFERENCES:
patent: 4912782 (1990-04-01), Robbins
patent: 5830334 (1998-11-01), Kobayashi
patent: 6036118 (2000-03-01), Walker et al.
Chin Yi-Hua
Lee Chun-Chieh
Tsai Dong-Tay
Tseng Hua-Jen
Hwu Davis
Kashnikow Andres
Mosel Vitelic Inc.
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