Slurry nozzle

Fluid sprinkling – spraying – and diffusing – Flow deflecting or rotation controlling means – Chamber-like deflector

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

239520, B05B 126

Patent

active

061490784

ABSTRACT:
A slurry nozzle for supplying slurry in chemical mechanical polishing (CMP) including at least one slurry line, a slurry nozzle enclosure for accommodating the slurry line, and a baffle ring mounted at one end of the slurry nozzle enclosure. A plurality of apertures is formed on the sidewall of the slurry line for the slurry to spray out. The slurry spraying out from the slurry line flows down along the inner sidewall of the slurry baffle ring after the slurry impinges onto the slurry baffle ring.

REFERENCES:
patent: 4912782 (1990-04-01), Robbins
patent: 5830334 (1998-11-01), Kobayashi
patent: 6036118 (2000-03-01), Walker et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Slurry nozzle does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Slurry nozzle, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Slurry nozzle will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1250078

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.