Slurry distribution system that continuously circulates slurry t

Details Slurry distribution system that continuously circulates slurry t Slurry distribution system that continuously circulates slurry t

1997-04-17

1999-09-28

Eley, Timothy V.

Abrading

Abrading process

Abradant supplying

451 87, 451 88, B24B 719, B24B 730

Patent

active

059577592

ABSTRACT:
A slurry distribution system for distributing slurry to a polishing machine that polishes a semiconductor wafer is disclosed. The slurry distribution system includes a storage tank for storing the slurry, a mixing device for mixing the slurry in the storage tank, a distribution loop with an inlet and outlet in fluid communication with the storage tank, a valve in fluid communication with the distribution loop for dispensing the slurry to the polishing machine, and a pump for circulating the slurry from the storage tank through the distribution loop and into the storage tank regardless of whether the slurry is dispensed to the polishing machine. In this manner, the slurry is agitated and efficiently used during polishing and during intervals between polishing.

REFERENCES:
patent: 2613482 (1952-10-01), Hamacher
patent: 2819569 (1958-01-01), Angenieux
patent: 3162986 (1964-12-01), Olivieri
patent: 3916574 (1975-11-01), Prunier
patent: 4059929 (1977-11-01), Bishop
patent: 4242841 (1981-01-01), Ushakov et al.
patent: 4513894 (1985-04-01), Doyle et al.
patent: 4784295 (1988-11-01), Holmstrand
patent: 4851113 (1989-07-01), Evans
patent: 5110463 (1992-05-01), Yuichi et al.
patent: 5377451 (1995-01-01), Leoni et al.
patent: 5407526 (1995-04-01), Danielson et al.
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5516327 (1996-05-01), Kawasaki
patent: 5538462 (1996-07-01), Gnadt
patent: 5586927 (1996-12-01), Herbert
patent: 5591064 (1997-01-01), Spears, Jr.
patent: 5664990 (1997-09-01), Adams et al.

Affiliated with

Also associated with

Rating

Slurry distribution system that continuously circulates slurry t does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Slurry distribution system that continuously circulates slurry t, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Slurry distribution system that continuously circulates slurry t will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-696094