Slurry circulation type surface polishing machine

Details Slurry circulation type surface polishing machine Slurry circulation type surface polishing machine

1999-03-02

2000-12-12

Scherbel, David A.

Abrading

Machine

Rotary tool

451 60, 451446, B24B 100

Patent

active

061590827

ABSTRACT:
The bottom of each collection groove for collecting a used abrasive slurry and a rinsing solution is formed like the letter V, an exhaust port is formed at the lowest position of the bottom of the groove, the collection pipe of a slurry supply unit and the collection pipe of a rinsing solution supply unit are connected to the exhaust port, and the collection pipe of the rinsing solution exhaust unit is connected to a suction pump for forcedly discharging the rinsing solution by suction.

REFERENCES:
patent: 5113622 (1992-05-01), Nishiguchi et al.
patent: 5664990 (1997-09-01), Adams et al.
patent: 5993647 (1999-11-01), Huang et al.
patent: 6006738 (1999-12-01), Itoh et al.

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