Sluice valve arrangement

Details Sluice valve arrangement Sluice valve arrangement

1982-06-09

1984-07-03

Weakley, Harold W.

Valves and valve actuation

With correlated flow path

With mounting or support

251161, 251175, F16K 3102

Patent

active

044574886

ABSTRACT:
A sluice valve arrangement is adapted to make an air-tight partition or communication between a vacuum treatment chamber and the atmosphere or a pre-chamber. This arrangement includes a valve seat member comprising a cylindrical or spherical member having therein an opening, a pair of guide rails attached to the inner circumference of the seat member, a valve member movably supported on the guide rails, and means for air-tight engagement of the valve member and the valve seat portion of the seat member. The valve member has a curvature equal to that of the cylindrical or spherical member, and the engagement means comprises a plurality of bellows expandable by a compressed gas or air.

REFERENCES:
patent: 2649275 (1953-08-01), Noyes
patent: 2864133 (1958-12-01), Younger
patent: 3343562 (1967-09-01), Combes
patent: 3485475 (1969-12-01), Moore
patent: 3585757 (1971-06-01), Bitchie
patent: 3591135 (1971-07-01), Miller
patent: 3717322 (1973-02-01), Bernard

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