Slotted cantilever diffusion tube system and method and apparatu

Details Slotted cantilever diffusion tube system and method and apparatu Slotted cantilever diffusion tube system and method and apparatu

1984-07-18

1985-09-24

Camby, John J.

Heating

Processes of heating or heater operation

Treating an article, container, batch or body as a unit

432123, 432208, 432239, 432258, F27D 300, F27B 914, F27B 502, F27D 500

Patent

active

045430594

ABSTRACT:
A cantilever tube for carrying loaded wafer boats into a diffusion furnace and confining flow of gas through the wafers includes an elongated slot extending from an open end of the tube to a predetermined region in which the wafer boats are positioned, the wafer boats abutting each other and forming a sealing cover for the elongated slot. A narrow boat carrier supported on a carriage system extends through the elongated slot and carries a wafer boat loaded with wafers into the open end and to the predetermined region in the cantilever tube without allowing either the carrier, or the wafer boat, or the wafers to touch the cantilever tube. The carrier lowers the boat onto the bottom inner surface of the tube, causing the boat to cover a portion of the elongated slot. The procedure is repeated for subsequent wafer boats, each of which abuts the previous one, to effectively close and seal the elongated slot when all of the wafer boats are positioned inside the cantilever tube.

REFERENCES:
patent: 4459104 (1984-07-01), Wollmann
patent: 4468195 (1984-08-01), Sasaki et al.

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