Sloped cantilever beam electrode for a MEMS device

Details Sloped cantilever beam electrode for a MEMS device Sloped cantilever beam electrode for a MEMS device

2006-08-02

2008-12-16

Choi, William C (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S225100

Reexamination Certificate

active

07466476

ABSTRACT:
A method of tilting a micromirror includes providing a substrate, a sloped electrode outwardly from the substrate, and a sloped electrode positioning system outwardly from the substrate. The method also includes applying, by the sloped electrode positioning system, forces sufficient to position the sloped electrode in an orientation that slopes away from the substrate.

REFERENCES:
patent: 6383357 (2002-05-01), Maciossek
patent: 6487001 (2002-11-01), Greywall
patent: 6552840 (2003-04-01), Knipe
patent: 6825967 (2004-11-01), Chong et al.
patent: 6825968 (2004-11-01), Aubuchon
patent: 2007/0018065 (2007-01-01), Denatale et al.
Wagner, B., et al., “Bistable Microvalve With Pneumatically Coupled Membranes”, © 1996 IEEE, pp. 384-388, 1996.
Wagner, B., et al., “Infrared Micromirror Array with Large Pixel Size and Large Deflection Angle”, Transducers '97, 1997 International Conference on Solid-State Sensors and Actuators, © 1997 IEEE, pp. 75-78, Jun. 16-19, 1997.
Reimer, K., et al., “16 k Infrared Micromirror Arrays with Large Beam Deflection and Tenth Millimeter Pixel Size”, Part of the SPIE Conference on Miniaturized Systems with Micro-Optics and MEMS, SPIE vol. 3878, pp. 272-280, Sep. 1999.
Fraunhofer Institut Siliziumtechnologie, “Achievements and Results Annual Report 2001”, pp. 1-5 and 40-41, 2001.
Sawada, Renshi, et al., “Improved Single Crystalline Mirror Actuated Electrostatically By Terraced Electrodes With High-Aspect Ratio Torsion Spring”, © 2003 IEEE, pp. 153-154, 2003.
Urano, M., et al., “Novel Fabrication Process and Structure of a Low-Voltage-Operation Micromirror Array for Optical MEMS Switches”, © 2003 IEEE, IEDM 03-965, - 03-968, 39.5.1-39.5.4, 2003.
Cichalewski, Wojciech, et al., “Analytical modelling and simulations of a MEMS micro-mirror—MATLAB implementation”, CADSM 2003, pp. 360-365, Feb. 18-22, 2003.
Yamamoto, Tsuyoshi, et al., “A Three-Dimensional MEMS Optical Switching Module Having 100 Input and 100 Output Ports”, IEEE Photonics Technology Letters, vol. 15, No. 10, pp. 1360-1362, Oct. 2003.
Yamamoto, Tsuyoshi, et al., “Development of a Large-scale 3D MEMS Optical Switch Module”, Selected Papers, NTT Technical Review, vol. 1, No. 7, pp. 37-42, Oct. 2003.
Lebrecht von Trotha, et al., “Advanced MEMS Fabrication Using CMP”, http://www.reed-electronics.com/semiconductor/index.asp/layout=articlePrint&article—ID=CA440, pp. 1-5, Aug. 11, 2004.
Fraunhofer Institut für Silizium Technologie, “Digital Micromirror Arrays”, http://www.isit.fhg.de/english/mst/micromirror.html, 2 pages, Oct. 30, 2005.
Rao, Masa P., et al., “Bulk Micromachined Titanium Micromirror Device With Sloping Electrode Geometry”, Mechanical & Environmental Engineering Department, University of California, Santa Barbara, Santa Barbara, California, 4 pages, Printed Jun. 21, 2006.
Urano, M., et al., “Fabrication of Low-Voltage Optical MEMS Switches by Using Seamless Integration Technology”, NTT Microsystem Integration Laboratories, Kanagawa, Japan, 1 page, Printed Jun. 21, 2006.
U.S. Appl. No. 11/110,027, filed Apr. 20, 2005 entitled: “Isolation Layer for Semiconductor Devices and Method for Forming the Same”, 18 pages.
U.S. Appl. No. 11/172,348, filed Jun. 30, 2005 entitled: “Versatile System for Restricting Movement of MEMS Structures”, 30 pages.
U.S. Appl. No. 11/304,042, filed Dec. 15, 2005 entitled: “Ultra Dark Polymer”, 29 pages.
U.S. Appl. No. 11/402,411, filed Apr. 12, 2006 entitled: “System and Method for Increasing Image Quality in a Display System”, 30 pages.
U.S. Patent Application filed Aug. 2, 2006 entitled: “Sloping Electrodes In A Spatial Light Modulator”, 23 pages.

Affiliated with

Also associated with

Rating

Sloped cantilever beam electrode for a MEMS device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Sloped cantilever beam electrode for a MEMS device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Sloped cantilever beam electrode for a MEMS device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4029687