Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1997-04-10
1998-11-03
Rutledge, D.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 69, G03B 2774, G03B 2772
Patent
active
058317163
ABSTRACT:
A light exposure apparatus used for manufacturing semiconductors, liquid crystal display elements or the like is provided with an illuminating optical system for illuminating a mask formed with a pattern with pulse light from a light source, a mask stage for loading the mask, a substrate stage for loading the photo-sensitive substrate, and a driving system for synchronously scanning the mask stage and a substrate stage. The light exposure apparatus further includes a stop having two edges for limiting the shape of an illuminating area on the mask to a predetermined shape due to an illuminating optical system, an edge position adjusting portion for adjusting a position of one or both edges with respect to a scanning direction, an exposure light energy detecting unit for detecting energy per pulse, a calculating portion for calculating, based on information from the exposure light energy detecting unit, accumulating amounts of exposure light per each of accumulated exposure light amount calculating zones obtained by dividing the illuminating area at predetermined intervals in the scanning direction of the photo-sensitive substrate, and a control portion for controlling the edge position adjusting portion in response to a difference between a predetermined accumulated amount of exposure light and a calculated amount of exposure light.
REFERENCES:
patent: 4682885 (1987-07-01), Torigoe
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4819033 (1989-04-01), Yoshitake et al.
patent: 4822975 (1989-04-01), Torigoe
patent: 4884101 (1989-11-01), Tanimoto
patent: 4901109 (1990-02-01), Mitome et al.
patent: 4905041 (1990-02-01), Aketagawa
patent: 4924257 (1990-05-01), Jain
patent: 4970546 (1990-11-01), Suzuki et al.
patent: 5053614 (1991-10-01), Yui et al.
patent: 5097291 (1992-03-01), Suzuki
patent: 5107275 (1992-04-01), Tsuruoka et al.
patent: 5119390 (1992-06-01), Ohmori
patent: 5121160 (1992-06-01), Sano et al.
patent: 5148214 (1992-09-01), Miura et al.
patent: 5160962 (1992-11-01), Nishi
patent: 5194893 (1993-03-01), Nishi
patent: 5227839 (1993-07-01), Allen
patent: 5250797 (1993-10-01), Sano et al.
patent: 5255051 (1993-10-01), Allen
patent: 5281996 (1994-01-01), Bruning et al.
patent: 5285236 (1994-02-01), Jain
patent: 5291240 (1994-03-01), Jain
patent: 5329336 (1994-07-01), Hirano
patent: 5363172 (1994-11-01), Tokuda
patent: 5473410 (1995-12-01), Nishi
patent: 5477304 (1995-12-01), Nishi
patent: 5567928 (1996-10-01), Sano
patent: 5581075 (1996-12-01), Naruki et al.
patent: 5663784 (1997-09-01), Tanimoto
Nikon Corporation
Rutledge D.
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