Slit nozzle and apparatus for supplying treatment liquid...

Details Slit nozzle and apparatus for supplying treatment liquid... Slit nozzle and apparatus for supplying treatment liquid...

2008-06-03

2008-06-03

Tadesse, Yewebdar (Department: 1792)

Coating apparatus

Projection or spray type

C118S667000, C118S410000, C239S568000

Reexamination Certificate

active

07381270

ABSTRACT:
A slit nozzle which is easily manufactured and in which no capillary action occurs, and an apparatus for supplying a treatment liquid using the slit nozzle are disclosed. The slit nozzle is constructed of a left portion and a right portion joined to each other, one of which is made of metal and the other of which is made of resin. In the apparatus for supplying a treatment liquid using one or more of the slit nozzles, the slit nozzles are provided in a circulating passage of a treatment liquid whose temperature is controlled.

REFERENCES:
patent: 6258167 (2001-07-01), Kawano et al.
patent: 63-39658 (1994-12-01), None
patent: 11145044 (1999-05-01), None
patent: 2000102759 (2000-04-01), None
patent: 2001000907 (2001-01-01), None
patent: 3236703 (2001-09-01), None
English traslated Abstract and detailed descriptions of JP411145044A.

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