Slit disk for modified faraday cup diagnostic for...

Radiant energy – Electron energy analysis

Reexamination Certificate

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Details

C250S306000, C250S307000, C250S492100, C250S492300, C250S493100, C250S336100, C250S324000, C324S071100, C324S071300

Reexamination Certificate

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07902503

ABSTRACT:
A diagnostic system for characterization of an electron beam or an ion beam includes an electrical conducting disk of refractory material having a circumference, a center, and a Faraday cup assembly positioned to receive the electron beam or ion beam. At least one slit in the disk provides diagnostic characterization of the electron beam or ion beam. The at least one slit is located between the circumference and the center of the disk and includes a radial portion that is in radial alignment with the center and a portion that deviates from radial alignment with the center. The electron beam or ion beam is directed onto the disk and translated to the at least one slit wherein the electron beam or ion beam enters the at least one slit for providing diagnostic characterization of the electron beam or ion beam.

REFERENCES:
patent: 6300755 (2001-10-01), Elmer et al.
patent: 7288772 (2007-10-01), Elmer et al.
patent: 7378830 (2008-05-01), Teruya et al.

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