Slit coater having apparatus for supplying a coating solution

Details Slit coater having apparatus for supplying a coating solution Slit coater having apparatus for supplying a coating solution

2005-08-19

2008-11-11

Tadesse, Yewebdar T (Department: 1792)

Coating apparatus

Projection or spray type

Work-supported and guided carriage

C118S300000, C118S302000, C118S602000, C118S410000, C118S429000, C239S568000

Reexamination Certificate

active

07449069

ABSTRACT:
A slit coater including an apparatus for supplying coating solution by a coating method using a slit nozzle, which is configured to minimize contamination of coating solution, utilizing a filtering function, and supplying a controlled amount of photosensitive solution to a slit nozzle. The slit coater further includes a table on which an object to be processed is mounted, a slit nozzle unit that applies coating solution onto a surface of the object to be processed, and a coating solution supply apparatus including a storage tank that stores the coating solution, a pump that supplies the coating solution stored in the storage tank to the slit nozzle unit, and a buffer tank that is in fluid communication with the pump and the storage tank.

REFERENCES:
patent: 4987852 (1991-01-01), Sakai et al.
patent: 5167837 (1992-12-01), Snodgrass et al.
patent: 5919520 (1999-07-01), Tateyama et al.
patent: 6319323 (2001-11-01), Gibson et al.
patent: 6475282 (2002-11-01), Snodgrass et al.
patent: 6488041 (2002-12-01), Kabbani et al.
patent: 6540833 (2003-04-01), Gibson et al.
patent: 6548115 (2003-04-01), Gibson et al.
patent: 6616760 (2003-09-01), Kitano et al.
patent: 64-032680 (1989-02-01), None
patent: 01-164474 (1989-06-01), None
patent: 07-080385 (1995-03-01), None
patent: 07-171479 (1995-07-01), None
patent: 07-185434 (1995-07-01), None
patent: 07-185437 (1995-07-01), None
patent: 07-326564 (1995-12-01), None
patent: 08-150359 (1996-06-01), None
patent: 08-155365 (1996-06-01), None
patent: 08-173878 (1996-07-01), None
patent: 09-131561 (1997-05-01), None
patent: 09-164357 (1997-06-01), None
patent: 09-192566 (1997-07-01), None
patent: 09-206652 (1997-08-01), None
patent: 09-237748 (1997-09-01), None
patent: 09-271705 (1997-10-01), None
patent: 09-330876 (1997-12-01), None
patent: 10-156255 (1998-06-01), None
patent: 10-308338 (1998-11-01), None
patent: 11-154641 (1999-06-01), None
patent: 11-274071 (1999-10-01), None
patent: 2000-135463 (2000-05-01), None
patent: 2000-167469 (2000-06-01), None
patent: 2000-288488 (2000-10-01), None
patent: 2001-103202 (2001-04-01), None
patent: 2001-310147 (2001-11-01), None
patent: 2001-310152 (2001-11-01), None
patent: 2002-015664 (2002-01-01), None
patent: 2002-066432 (2002-03-01), None
patent: 2002-066487 (2002-03-01), None
patent: 2002-113411 (2002-04-01), None
patent: 2002-204996 (2002-07-01), None
patent: 2002-282760 (2002-10-01), None
patent: 2002-346453 (2002-12-01), None
patent: 2003-093944 (2003-04-01), None
patent: 2003-236435 (2003-08-01), None
patent: 2003-245591 (2003-09-01), None
patent: 1019940000157 (1994-01-01), None
patent: 1019950030213 (1995-11-01), None
patent: 101996005857 (1996-02-01), None
patent: 101996021170 (1996-07-01), None
patent: 1019970701099 (1997-03-01), None
patent: 1019970051813 (1997-07-01), None
patent: 1019970063518 (1997-09-01), None
patent: 1019970072019 (1997-11-01), None
patent: 101998063704 (1998-10-01), None
patent: 1019980087322 (1998-12-01), None
patent: 101999029827 (1999-04-01), None
patent: 1020010006575 (2001-01-01), None
patent: 1020010086065 (2001-07-01), None
patent: 1020020018973 (2002-03-01), None
patent: 1020020018974 (2002-03-01), None
patent: 1020020019406 (2002-03-01), None
patent: 1020020028829 (2002-04-01), None
patent: 1020020029323 (2002-04-01), None
patent: 1020020077814 (2002-10-01), None
patent: 1020020080440 (2002-10-01), None
patent: 1020030003114 (2003-01-01), None
patent: 1020030011462 (2003-02-01), None
patent: 1020030011463 (2003-02-01), None
patent: 1020030045636 (2003-06-01), None
patent: 2004-89960 (2004-10-01), None
Office Action dated Sep. 26, 2006 for corresponding Korean Patent Application No. 10-2004-0114395.

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