Slit coater

Details Slit coater Slit coater

2005-08-19

2008-08-26

Meeks, Timothy (Department: 1792)

Coating processes

Electrical product produced

C427S427300, C118S323000

Reexamination Certificate

active

07416758

ABSTRACT:
A slit coater including buffer members having elasticity and installed at both sides of a slit nozzle unit, compensating for a height difference between both sides, preventing breakdown due to excessive stress generated by the height, and reducing set-up time. The slit coater includes: a table on which an object to be processed is mounted; a slit nozzle unit formed above the table for applying coating solution onto the object; a driving unit moving the slit nozzle unit in a predetermined direction; and buffer members having elasticity installed at both sides of the slit nozzle unit.

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