Slip resistant horizontal semiconductor wafer boat

Details Slip resistant horizontal semiconductor wafer boat Slip resistant horizontal semiconductor wafer boat

2006-06-06

2006-06-06

Novosad, Jennifer E. (Department: 3634)

Supports: racks

Special article

Platelike

Reexamination Certificate

active

07055702

ABSTRACT:
A horizontal wafer boat for maintaining semiconductor wafers during wafer processing is disclosed. The wafer boat is configured to reduce the likelihood wafer slip when wafers are heated to processing temperatures of about 1000° C. and above.

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