Slip free vertical rack design having rounded horizontal arms

Details Slip free vertical rack design having rounded horizontal arms Slip free vertical rack design having rounded horizontal arms

1998-02-27

1999-08-03

Walberg, Teresa

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

432253, 211 4118, 206454, F27D 500

Patent

active

059316667

ABSTRACT:
The invention relates to a vertical rack for semiconductor wafer processing having strictly horizontally disposed arms wherein each arms has a rounded tip.

REFERENCES:
patent: 3756581 (1973-09-01), Albertini
patent: 4802842 (1989-02-01), Hirayama
patent: 5169453 (1992-12-01), Takagi
patent: 5219079 (1993-06-01), Nakamura
patent: 5316472 (1994-05-01), Niino et al.
patent: 5393226 (1995-02-01), Groom
patent: 5431561 (1995-07-01), Yamabe et al.
patent: 5492229 (1996-02-01), Tanaka et al.
patent: 5534074 (1996-07-01), Koons
patent: 5586880 (1996-12-01), Ohsawa
patent: 5725101 (1998-03-01), Kakizaki et al.

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