Slider with micro-texture and method for forming the same

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S603070, C029S603180, C216S013000, C216S014000, C216S056000, C360S235400, C360S236400

Reexamination Certificate

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07886423

ABSTRACT:
A method for forming micro-texture on ABS of a slider, includes steps of: positioning sliders arranged in arrays on a tray, each slider having a pole tip facing upward; loading the tray into a processing chamber, and evacuating the processing chamber to a preset pressure; introducing a mixture gas of inert gas and hydrocarbon gas into the processing chamber, and ionizing the mixture gas to produce ion beams; exposing the sliders to the ion beam for etching so as to form micro-texture with two-step structure on the ABS of the slider. The invention also discloses a method of manufacturing a slider having micro-texture.

REFERENCES:
patent: 5862013 (1999-01-01), Haga
patent: 6001268 (1999-12-01), Nguyen et al.
patent: 6004472 (1999-12-01), Dorius et al.
patent: 6086796 (2000-07-01), Brown et al.
patent: 2005/0243469 (2005-11-01), Chaw et al.
patent: 2007/0050971 (2007-03-01), Ueda et al.
patent: 2166888 (1986-05-01), None
Nakanishi et al. “Floating Thin Film Head Fabricated by Ion Etching Method” Sep. 1980, IEEE Transactions on Magnetics vol. 16, No. 5, pp. 785-787.

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