Slide-type cylinder coupling for CMP load cup

Details Slide-type cylinder coupling for CMP load cup Slide-type cylinder coupling for CMP load cup

2005-11-29

2005-11-29

Lazo, Thomas E. (Department: 3745)

Expansible chamber devices

With assembly or disassembly facilitating means

C092S129000, C092S258000

Reexamination Certificate

active

06968772

ABSTRACT:
A slide-type cylinder coupling which is suitable for the quick connect/disconnect attachment of a lift piston on a pedestal lift cylinder to a lift pedestal on a load cup or HCLU station of a chemical mechanical polishing apparatus. The cylinder coupling includes a coupling bolt which is provided on the lift piston and a coupling bracket which is provided on the bottom surface of the lift pedestal. The coupling bolt is slidably inserted in the coupling bracket to removably connect the lift cylinder to the lift pedestal. The coupling bolt is slidably removed from the coupling bracket to disconnect the lift cylinder from the lift pedestal for replacement or maintenance of the lift cylinder.

REFERENCES:
patent: 5778759 (1998-07-01), Johnson
patent: 6171070 (2001-01-01), Mitake
patent: 6186763 (2001-02-01), Scanlan
patent: 6279453 (2001-08-01), Funck

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