Six-axis force sensor chip and six-axis force sensor using...

Details Six-axis force sensor chip and six-axis force sensor using... Six-axis force sensor chip and six-axis force sensor using...

2005-10-04

2005-10-04

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Dynamometers

Responsive to multiple loads or load components

Reexamination Certificate

active

06951142

ABSTRACT:
A thin plate-shaped six-axis force sensor chip comprising a semiconductor substrate formed by semiconductor film-forming processes, the sensor chip having through-holes formed therein and arranged so that the sensor chip is functionally divided by the through-holes into an action part to which an external force is applied, a support part to be fixed to an external structure, and a plurality of connecting parts each connecting together the action part and the support part and having a bridge portion of generally T-shaped configuration joined to the action part and an elastic portion joined to the support part. Each of the connecting parts has a plurality of strain resistance devices each comprising an active layer formed on at least one of front and rear faces thereof in an area thereof where deformation strain effectively occurs, the strain resistance devices being electrically connected to corresponding electrodes disposed in the support part.

REFERENCES:
patent: 4448083 (1984-05-01), Hayashi
patent: 4695963 (1987-09-01), Sagisawa et al.
patent: 5095762 (1992-03-01), Holm-Kennedy et al.
patent: 5263375 (1993-11-01), Okada
patent: 5490427 (1996-02-01), Yee et al.
patent: 5773728 (1998-06-01), Tsukada et al.
patent: 5811694 (1998-09-01), Kamentser et al.
patent: 5889214 (1999-03-01), Kang et al.
patent: 57-169643 (1982-10-01), None
patent: 01-063831 (1989-03-01), None

Affiliated with

Also associated with

Rating

Six-axis force sensor chip and six-axis force sensor using... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Six-axis force sensor chip and six-axis force sensor using..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Six-axis force sensor chip and six-axis force sensor using... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3490691