Supports – With condition responsive control means
Patent
1997-10-07
2000-07-18
Williams, Hezron
Supports
With condition responsive control means
248562, 248636, 248638, 702 56, F16M 1300
Patent
active
06089525&
ABSTRACT:
An active vibration isolation and payload reaction force compensation system includes a number of isolation legs which support equipment subject to undesirable vibrations. Each leg includes an elastomeric support member which supports the mass of the equipment and attenuates seismic forces transmitted from the ground to the system. A number of force actuators fixed to each leg and to the equipment in oppositely directed pairs provide forces directed to compensate for motions of the equipment. Six accelerometers are provided on the equipment to measure accelerations in six degrees of freedom. A control system, responsive to signals from the accelerometers, causes actuation of the force actuators.
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Jones Allston L.
Miller Rose M.
Ultratech Stepper, Inc.
Williams Hezron
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