SiO 2 -TiO 2 glass body with improved resistance to radiation

Details SiO 2 -TiO 2 glass body with improved resistance to radiation SiO 2 -TiO 2 glass body with improved resistance to radiation

2007-02-06

2007-02-06

Sample, David (Department: 1755)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C065S017400, C065S032100, C065S104000, C065S111000

Reexamination Certificate

active

11087885

ABSTRACT:
The invention discloses an SiO2—TiO2glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.

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