Electric heating – Metal heating – Of cylinders
Patent
1988-03-21
1989-05-23
Leung, Philip H.
Electric heating
Metal heating
Of cylinders
219 1043, 373139, 336223, 336232, H05B 640
Patent
active
048332879
ABSTRACT:
This invention relates to a single-turn induction heating coil used for floating-zone melting process. According to this invention, both ends of a single-turn coil are crossed each other in a peripheral direction of the coil so as to form an overlap section, and a pair of power supply portions are arranged on an outer peripheral wall so as to allow this RF current flowing through the coil, thereby forming a uniform magnetic field of the coil, and realizing magnetic concentration on an object. As a result, the floating-zone melting process can be stabilized to increase the productivity and striation, microscopic resistance variations and other quality defects of semiconductor crystals manufactured by the heating coil can be prevented as well.
REFERENCES:
patent: 2655588 (1953-10-01), Wadhams
patent: 2678371 (1954-05-01), Andrew
patent: 3031555 (1962-04-01), Ross et al.
patent: 3607114 (1971-09-01), Keller
patent: 3607138 (1971-09-01), Keller
patent: 3827017 (1974-07-01), Keller
patent: 4220839 (1980-09-01), De Leon
Abe Takao
Muraoka Shyouzo
Leung Philip H.
Shin-Etsu Handotai & Co., Ltd.
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