Optics: measuring and testing – By polarized light examination
Patent
1999-01-19
2000-10-31
Kim, Robert
Optics: measuring and testing
By polarized light examination
356369, G01J 400
Patent
active
061411027
ABSTRACT:
Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.
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Green Steven E.
Herzinger Craig M.
Johs Blaine D.
J. A. Woolam Co. INC
Kim Robert
Lee Andrew
Welch James D.
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