Single side work polishing apparatus

Details Single side work polishing apparatus Single side work polishing apparatus

1999-04-02

2000-09-12

Hail, III, Joseph J.

Abrading

Accessory

Tool cleaner

451 56, B24B 2118

Patent

active

061169978

ABSTRACT:
A single side work polishing apparatus rectifies the surface geometry of a polishing pad during the polishing of a work. A correction roller is mounted to a pressure member that pushes a work against a polishing pad held by a rotating surface plate. The correction roller has a length substantially equivalent to the width of the working area of the polishing pad and is arranged along the radial direction of the surface plate. During polishing, the work and the correction roller are pressed against the polishing pad by the pressure member. The correction roller rotates about its longitudinal axis to rectify the polishing pad while the work is being polished.

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patent: 5885147 (1999-03-01), Kreager et al.
patent: 5938507 (1999-08-01), Ko et al.

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