Fishing – trapping – and vermin destroying
Patent
1990-12-17
1995-03-21
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437925, 29 2501, 414231, 414232, 414234, 414235, 414242, 414243, 414253, 414262, 414783, 414936, 414937, 414938, 414939, 414940, H01L 2168, G06F 1546, B65G 3500
Patent
active
053995317
ABSTRACT:
A manufacturing system and method for processing semiconductor wafers through a plurality of processing stations that perform manufacturing operations on wafers includes a plurality of processing stations, each of which are capable of performing at least one processing operation on a wafer, each of the processing stations having a controlled environment for processing the wafers, and a branched tunnel joined and communicating with the controlled environment. A means is provided for maintaining a clean environment in the tunnel. Within the tunnel there are provided a plurality of guided transport vehicles adapted to travel between the process stations. A plurality of wafer carriers, each adapted to support a single wafer and be carried by the transport vehicles, are part of the system.
REFERENCES:
patent: 3845286 (1974-10-01), Aronstrin et al.
patent: 4492504 (1985-01-01), Hainsworth
patent: 4540326 (1985-09-01), Southworth et al.
patent: 4833306 (1989-05-01), Milbrett
patent: 4838150 (1989-06-01), Suzuki et al.
patent: 4846297 (1989-07-01), Field et al.
Chaudhuri Olik
Graybill David E.
Saile George O.
United Micrpelectronics Corporation
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