Single semiconductor wafer transfer method and manufacturing sys

Details Single semiconductor wafer transfer method and manufacturing sys Single semiconductor wafer transfer method and manufacturing sys

1997-02-14

1999-11-02

Monin, Donald

Metal working

Barrier layer or semiconductor device making

438106, 438907, 414937, 414939, H01L 2168

Patent

active

059761997

ABSTRACT:
A manufacturing system for individually processing semiconductor wafers through a plurality of processing stations. The system has a plurality of processing stations, a multilevel track system that interfaces with the processing stations, and guided transport vehicles that operate on the track system to move individual wafers in wafer carriers between the stations. The carriers have a storage memory that contains the required process sequence and the capability to remember the completed process steps.

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