Single-pole double-throw MEMS switch

Details Single-pole double-throw MEMS switch Single-pole double-throw MEMS switch

2005-04-12

2010-10-19

Enad, Elvin G (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C438S406000, C228S123100

Reexamination Certificate

active

07816999

ABSTRACT:
MEMS switches of varying configurations provide individually acutatable contacts. The MEMS switches are sealed by an improved anodic bonding technique.

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