Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1994-01-10
1994-12-27
Reynolds, Bruce A.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
361313, 361322, 361330, 257532, 257724, H01G 103, H01G 410, H01G 438
Patent
active
053770722
ABSTRACT:
A single metal-plate bypass capacitor (10) includes a metal top plate (26) separated from a silicon substrate (12) by a thermally-grown, silicon dioxide dielectric (16) layer. An additional silicon plate (36) can be included intermediate to the metal top plate (26) and the silicon substrate (12) for multiple power supply devices. The silicon substrate (12) is electrically accessed through a metal contact pad (28) overlying a doped region (34) of the silicon substrate (12). The metal contact pad (28) is electrically isolated from the top plate (26) by an isolation structure (30). The bypass capacitor (10) is designed to be attached directly to the top surface of a semiconductor device (18), which enables the bypass capacitor (10) to be interconnected to the semiconductor device (18) by a plurality of bonding wires (25) having a minimal length. Because the capacitor dielectric (16) is formed as a very thin layer by the thermal oxidation of silicon, the self-inductance of bypass capacitor (10) is minimized.
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Calhoun Kevin A.
Dahm Jonathan C.
Haas, Jr. Joseph M.
Osorio Rolando J.
Sparkman Aubrey K.
Dockrey Jasper W.
Mills Gregory L.
Motorola Inc.
Reynolds Bruce A.
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