Single-layer polishing pad and method producing the same

Details Single-layer polishing pad and method producing the same Single-layer polishing pad and method producing the same

2006-09-05

2006-09-05

Kuhns, Allan R. (Department: 1732)

Plastic and nonmetallic article shaping or treating: processes

Pore forming in situ

By gas forming or expanding

C264S139000

Reexamination Certificate

active

07101501

ABSTRACT:
A foamed plastic is cut to form a single-layer polishing pad having a desired rigidity and compressibility. A polishing surface of the polishing pad has a higher density than a mounting surface of the polishing pad. The polishing surface and the mounting surface may have different areas having different densities for achieving desired rigidity and compressibility property. Furthermore, methods of making such single-layer polishing pads are also disclosed.

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