Single grid focussed ion beam source

Details Single grid focussed ion beam source Single grid focussed ion beam source

1982-12-09

1985-08-27

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250427, 3133611, H01J 314

Patent

active

045380678

ABSTRACT:
A technique for providing an ion beam of variable focussing (concentration) is described using a flexible grid for extracting and accelerating ions from an ion plasma. The grid is electrically conducting and will bow depending on a voltage difference between it and the ion plasma. This bowing of the grid from its initial planar configuration provides focussing of the ion beam. The amount of focussing depends upon the amount the grid is bowed, which in turn depends upon the voltage difference between it and the ion plasma. The same ion source/flexible grid combination can be used for different operations as for example, providing a collimated, low energy ion beam over a large area and then for providing a focussed ion beam of high energy onto a small area.

REFERENCES:
patent: 2785311 (1957-03-01), Lawrence
patent: 4028579 (1977-06-01), King
patent: 4119881 (1978-10-01), Calderon
patent: 4259145 (1981-03-01), Harper et al.
patent: 4381453 (1983-04-01), Cuomo et al.
patent: 4439684 (1984-03-01), Hemmerich et al.

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