Single ended tuning fork inertial sensor and method

Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...

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7350416, 310370, G01P 904

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active

055222498

ABSTRACT:
Single ended tuning fork inertial sensor having a housing and a single ended tuning fork of a quartz-like material of a predetermined thickness, the tuning fork has first and second tines lying in a plane and having an axis of symmetry and has a body formed integral with said first and second tines. The body is rigidly secured to the housing. The tines have a rectangular cross section and have a width which is different from the thickness. The body has a stem formed therein which has a width less than that of the body. Drive electrodes are secured to the tines. An oscillatory frequency is supplied to the above drive electrodes to excite the tines in a drive mode and in the presence of an axial angular rate to cause the tines to operate in a pickup mode which is substantially separated in frequency from the drive mode. The electrode patterns are laser trimmed in order to reduce quadrature offset.

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Soderkvist, "Design of a solid-state gyroscopic sensor made of quartz," Sensors and Actuators, vol. A21, No. 1/3, Feb. 1990, pp. 293-296.

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