Single crystalline diamond and producing method thereof

Details Single crystalline diamond and producing method thereof Single crystalline diamond and producing method thereof

2006-04-12

2010-02-02

Kunemund, Robert M (Department: 1792)

Chemistry of inorganic compounds

Carbon or compound thereof

Elemental carbon

C423S414000, C428S833200, C428S835000, C117S929000

Reexamination Certificate

active

07655208

ABSTRACT:
The object of the present invention is to obtain a high quality single crystalline diamond that has less distortion and large area suitable for semiconductor device substrates or an optical component material. The present invention is a single crystalline diamond produced by chemical vapor deposition, wherein, when a linear polarized light which is composed of two linear polarized lights perpendicular to each other is introduced into one main face of the single crystalline diamond, a maximum value of a retardation between the two linear polarized lights perpendicular to each other which come out from an opposite main face is not more than 50 μm at maximum per a thickness of 100 μm across an entire of the single crystalline diamond, and also a method for producing the diamond.

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