Single crystal wafer of lithium tantalate

Details Single crystal wafer of lithium tantalate Single crystal wafer of lithium tantalate

1985-12-03

1988-07-05

Doll, John

Compositions

Piezoelectric

1566171, 156DIG65, 156DIG87, 310360, C01G 3500, C30B 1500, H01L 4122

Patent

active

047553146

ABSTRACT:
The x-cut single crystal wafer of lithium tantalate according to the invention is characterized by the orientation flat formed in a specific crystallographic orientation. The plane of the orientation flat should be (A) in parallel with the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15.degree. or smaller with the (018) plane or (B) in parallel with a plane which is in parallel with the x-axis and perpendicular to the (018) plane or a plane which is in parallel with the x-axis and makes an angle of 15.degree. or smaller with the plane which is in parallel with the x-axis and perpendicular to the (018) plane. In contrast to conventional lithium tantalate single crystal wafers provided with an orientation flat in a direction parallel to the 112.degree. Y direction, the location of the crystallographic orientation of the orientation flat is very easy and consequently great advantages are obtained in the working efficiency of locating the direction of the orientation flat and improved quality as well as increased yield of acceptable devices, e.g. SAW filters, prepared from the wafers.

REFERENCES:
patent: 3525885 (1970-08-01), Ballman et al.
patent: 3955109 (1976-05-01), Comparini et al.
patent: 4245200 (1981-01-01), Takahashi et al.
Hirano, H, LiTaO.sub.3 Crystals for Commercial SAW TV IF Filters, Ferroelectrics, vol. 27, pp. 151-156, 1980.
Rudd, D. et al., Growth of Lithium Tantalate Crystals for Transmission Resonator and Filter Devices, Solid State Tech., Jan. 1974, p. 52-55.

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