Single crystal pulling apparatus having slidable shield plate to

Details Single crystal pulling apparatus having slidable shield plate to Single crystal pulling apparatus having slidable shield plate to

1993-10-14

1995-09-19

Kunemund, Robert

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117213, 117218, 117202, 117 30, 117 35, C30B 1514

Patent

active

054508142

ABSTRACT:
A plurality of shield blades 31 for defining an opening 25 surrounding a single crystal 15 are provided between a melt 14 received in a crucible 10 and a screen 30. The shield blades 21 are carried by operation rods 23 so as to make the gap between the inner edges of the shield blades 23 and the surface of the single crystal 15 constant. Since crystal growth continues under the same condition from the beginning to the end, an obtained single crystal 15 is free from defects such as dislocations and excellent in homogenieity.

REFERENCES:
patent: 2979386 (1961-04-01), Shockley et al.
patent: 4330361 (1982-05-01), Kuhn-Kuhnenfeld et al.
patent: 4390505 (1983-08-01), Taylor et al.
patent: 4402786 (1983-09-01), Little
patent: 4956153 (1990-09-01), Yamagishi et al.
patent: 5316742 (1994-05-01), Tomioka et al.

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