Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1993-02-02

1994-11-08

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117208, 117217, C30B 1514, C30B 1520

Patent

active

053617215

ABSTRACT:
A single crystal pulling apparatus of Czochralski technique type including (i) a cylindrical partition adapted to divide the surface portion of the melt into an inner part and an outer part, the former being where the single crystal is grown and the latter being where granular polycrystal material is supplied, (ii) a flat ring having heat reflecting and insulating property held horizontally above the melt, and (iii) a vertically shiftable purge tube suspended centrally into the heating chamber adapted to enter into the inner hole of the flat ring.

REFERENCES:
patent: 4330361 (1982-05-01), Kuhn-Kuhnenfeld et al.
patent: 4330362 (1982-05-01), Kulehner
patent: 4915773 (1990-04-01), Kravetsky et al.
patent: 4956153 (1990-09-01), Yamagishi et al.
patent: 4981549 (1991-07-01), Yamashita et al.
patent: 5129986 (1992-07-01), Seki et al.
patent: 5196173 (1993-03-01), Arai et al.

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