Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1992-02-03

1993-10-19

Kunemund, Robert

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

1566171, 1566181, 156DIG93, C30B 1510

Patent

active

052543196

ABSTRACT:
Aa single crystal pulling apparatus installed on a frame body further includes a second frame body which is founded independently from the main chamber to rigidly support the winder assembly, and a hermetical and flexible tube which is provided between the winder assembly and the pull chamber to prevent any stress and vibration from travelling from the winder assembly to the pull chamber and vice versa, while providing a communication passage between the winder assembly and the pull chamber.

REFERENCES:
patent: 2893847 (1959-07-01), Schweickert et al.
patent: 2975036 (1961-03-01), Taylor et al.
patent: 3144308 (1964-08-01), Tarter
patent: 3173765 (1965-03-01), Gobat et al.
patent: 3194637 (1965-07-01), Longini et al.
patent: 3650701 (1972-03-01), Forrat
patent: 3953281 (1976-04-01), Pantusco et al.
patent: 4301120 (1981-11-01), Sibley
patent: 5096677 (1992-03-01), Katsuoka et al.

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