Single crystal pulling apparatus

Details Single crystal pulling apparatus Single crystal pulling apparatus

1992-02-10

1994-07-19

Chadhuri, Olik

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

117218, 117932, C30B 1502

Patent

active

053307291

ABSTRACT:
A single crystal pulling apparatus of the Czochralski method type wherein the cylindrical heater is supported not only by the two existing electrodes which are vertically shiftable but also by one or more vertical shafts, which may be electrodes or electrically insulated dummy electrodes; the vertical shafts are capable of shifting vertically in synchronism with the existing two electrodes, and are arranged in a manner such that the existing two electrodes and the vertical shafts are at regular intervals along the bottom circumference of the cylindrical heater.

REFERENCES:
patent: 4050905 (1977-09-01), Swinehart
patent: 5096677 (1992-03-01), Katsuoka et al.
patent: 5098675 (1992-03-01), Matsuo et al.
patent: 5135726 (1992-08-01), Min et al.

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